Underfill structure for semiconductor packages and methods of forming the same

ABSTRACT

A method for forming an underfill structure and semiconductor packages including the underfill structure are disclosed. In an embodiment, the semiconductor package may include a package including an integrated circuit die; an interposer bonded to the integrated circuit die by a plurality of die connectors; and an encapsulant surrounding the integrated circuit die. The semiconductor package may further include a package substrate bonded to the interposer by a plurality of conductive connectors; a first underfill between the package and the package substrate, the first underfill having a first coefficient of thermal expansion (CTE); and a second underfill surrounding the first underfill, the second underfill having a second CTE less than the first CTE.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional of U.S. patent application Ser. No.16/177,637, filed on Nov. 1, 2018 (now U.S. Pat. No. 11,075,133, issuingJul. 27, 2021), and entitled “Underfill Structure for SemiconductorPackages and Methods of Forming the Same,” which application claims thebenefit of U.S. Provisional Patent Application No. 62/692,177, filed onJun. 29, 2018, and entitled “Underfill Structure for SemiconductorPackages and Methods of Forming the Same,” which patent applications areincorporated herein by reference.

This application is related to U.S. patent application Ser. No.17/208,694, filed on Mar. 22, 2021, and entitled “Underfill Structurefor Semiconductor Packages and Methods of Forming the Same,” whichpatent application is incorporated herein by reference

BACKGROUND

Semiconductor devices are used in a variety of electronic applications,such as, for example, personal computers, cell phones, digital cameras,and other electronic equipment. Semiconductor devices are typicallyfabricated by sequentially depositing insulating or dielectric layers,conductive layers, and semiconductor layers of material over asemiconductor substrate, and patterning the various material layersusing lithography to form circuit components and elements thereon.

The semiconductor industry continues to improve the integration densityof various electronic components (e.g., transistors, diodes, resistors,capacitors, etc.) by continual reductions in minimum feature size, whichallow more components to be integrated into a given area. However, asthe minimum features sizes are reduced, additional problems arise thatshould be addressed.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIGS. 1 through 9B illustrate cross-sectional views of intermediarystages of manufacturing a semiconductor device package in accordancewith some embodiments.

FIGS. 10 through 17 illustrate cross-sectional views of intermediarystages of manufacturing a semiconductor device package in accordancewith some embodiments.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the invention. Specificexamples of components and arrangements are described below to simplifythe present disclosure. These are, of course, merely examples and arenot intended to be limiting. For example, the formation of a firstfeature over or on a second feature in the description that follows mayinclude embodiments in which the first and second features are formed indirect contact, and may also include embodiments in which additionalfeatures may be formed between the first and second features, such thatthe first and second features may not be in direct contact. In addition,the present disclosure may repeat reference numerals and/or letters inthe various examples. This repetition is for the purpose of simplicityand clarity and does not in itself dictate a relationship between thevarious embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

Embodiments discussed herein relate to underfill structures and methodsof forming underfill structures for use in various semiconductorpackages. In some embodiments, the underfill structures may be appliedto a device package comprising one or more semiconductor chips bonded toan interposer and a package substrate bonded to a side of the interposeropposing the one or more semiconductor chips. The device package may bereferred to a chip-on-wafer-on-substrate (CoWoS) ultra-thin sandwich(UTS) package. In other embodiments, the underfill structures may beapplied to a package structure (e.g., a package on package (PoP)structure) including a first package component and a second packagecomponent. The second package component may be a memory package (e.g.,having one or more dynamic random access memory (DRAM) dies), which isphysically and electrically coupled to the first package component(e.g., an integrated fan-out (InFO) package having a logic die andredistribution structures) using functional connectors.

The underfill structures may include a first underfill and a secondunderfill surrounding the first underfill. The second underfill may havea lower coefficient of thermal expansion (CTE) than the first underfill.Compared to embodiments in which an underfill structure only includes asingle underfill material, embodiments including the first underfill andthe second underfill may have improved reliability. For example, thefirst underfill and the second underfill may prevent underfill cracking,underfill delamination, and bump cracking by reducing high stress at thecorners of a packaged die, which may be a super-large die (e.g., a diehaving an area of greater than 1000 mm²). Including the first underfilland the second underfill can reduce the stress at the corners of thedies such that reliability is increased.

FIGS. 1 through 9B are various cross-sectional views of intermediatesteps during a process for forming a semiconductor device 900, inaccordance with some embodiments. In FIGS. 1 through 5 , a first devicepackage 100 is formed by bonding various integrated circuit dies to awafer 102. In an embodiment, the first device package 100 is achip-on-wafer (CoW) package, although it should be appreciated thatembodiments may be applied to other 3DIC packages. FIG. 5 shows theresulting first device package 100. In FIGS. 6 and 7 , a second devicepackage 700 is formed by mounting the first device package 100 to asubstrate. In an embodiment, the second device package 700 is achip-on-wafer-on-substrate (CoWoS) package, although it should beappreciated that embodiments may be applied to other 3DIC packages.FIGS. 9, 9A, and 9B show the semiconductor device 900 implementing theresulting second device package 700.

The wafer 102 may have a variety of devices formed in it. In particular,interposers, integrated circuit devices, or the like may be formed inthe wafer 102, which may include multiple device regions 100A and 100B(singulated in subsequent steps to form the first device packages 100).

In some embodiments, interposers are formed in the wafer 102. Theinterposers have interconnect structures for electrically connectingactive devices (not shown) in the integrated circuit dies to formfunctional circuits. In such embodiments, the wafer 102 includes asemiconductor substrate having a front surface (e.g., the surface facingupwards in FIG. 1 ), and a back surface (e.g., the surface facingdownwards in FIG. 1 ). An interconnect structure is formed on the backsurface of the semiconductor substrate. Through-vias (not explicitlyillustrated) are formed in the semiconductor substrate extending fromthe interconnect structure to the front surface of the semiconductorsubstrate. Metal lines and vias are formed in an interconnect structureon the semiconductor substrate by, e.g., a dual damascene process. Themetal lines and vias may be electrically connected to the through-vias.The interposers may (or may not) be free from active devices such astransistors and diodes, and may (or may not) be free from devices suchas resistors, inductors, capacitors, and the like.

Although embodiments illustrated herein are discussed in the context ofthe wafer 102 having interposers formed therein, it should beappreciated that other types of devices may be formed in the wafer 102.For example, integrated circuit devices such as logic devices may beformed in the wafer 102. In such embodiments, the wafer 102 includes asemiconductor substrate with active and/or passive devices formedtherein. The semiconductor substrate may be silicon, doped or undoped,or an active layer of a silicon-on-insulator (SOI) substrate. Thesemiconductor substrate may include other semiconductor materials, suchas germanium; a compound semiconductor including silicon carbide,gallium arsenic, gallium phosphide, indium phosphide, indium arsenide,and/or indium antimonide; an alloy semiconductor including SiGe, GaAsP,AlInAs, AlGaAs, GaInAs, GaInP, and/or GaInAsP; or combinations thereof.Other substrates, such as multi-layered or gradient substrates, may alsobe used. Devices, such as transistors, diodes, capacitors, resistors,etc., may be formed in and/or on the semiconductor substrate, and may beinterconnected by interconnect structures formed by, for example,metallization patterns in one or more dielectric layers on thesemiconductor substrate to form an integrated circuit.

As illustrated in FIG. 1 , die stacks 106 are attached to the wafer 102with die connectors 104. In an embodiment, a first die stack 106A (e.g.,a graphics processing unit (GPU)) and second die stacks 106B (e.g., ahigh bandwidth memory (HBM)) may be placed on each device region of thewafer 102. The die stacks 106 may be attached to the wafer 102 using,for example, a pick-and-place tool. The die connectors 104 may be formedfrom a conductive material such as solder, copper, aluminum, gold,nickel, silver, palladium, tin, the like, or a combination thereof. Insome embodiments, the die connectors 104 are formed by initially forminga layer of solder through methods such as evaporation, electroplating,printing, solder transfer, ball placement, or the like. Once a layer ofsolder has been formed on the structure, a reflow may be performed inorder to shape the die connectors 104 into desired bump shapes. The dieconnectors 104 form joints between corresponding connectors on the wafer102 and the die stacks 106, and electrically connect the wafer 102 tothe die stacks 106.

The die stacks 106 may each have a single function (e.g., a logicdevice, memory die, etc.), or may have multiple functions (e.g., asystem on chip (SoC)). In a particular embodiment, the first die stack106A is a processor and the second die stacks 106B are memory modules.More specifically, the first die stack 106A may be a processor such as acentral processing unit (CPU), GPU, application-specific integratedcircuit (ASIC), or the like. In some embodiments, the second die stacks106B may be memory devices such as dynamic random access memory (DRAM)dies, static random access memory (SRAM) dies, hybrid memory cube (HMC)modules, HBM modules, or the like.

In FIG. 2 , an underfill 202 may be formed between the die stacks 106and the wafer 102, surrounding the die connectors 104. The underfill 202may be formed by a capillary flow process after the die stacks 106 areattached, or may be formed by a suitable deposition method before thedie stacks 106 are attached. The underfill 202 may be formed by thetwo-step process described below in reference to FIGS. 8, 9, 16, and 17, or by another suitable process.

In FIG. 3 , an encapsulant 302 is formed on the various components. Theencapsulant 302 may be a molding compound, epoxy, or the like, and maybe applied by compression molding, transfer molding, or the like. Theencapsulant 302 may be formed over the wafer 102 such that the diestacks 106 are buried or covered, as illustrated in FIG. 3 . Theencapsulant 302 is then cured.

In FIG. 4 , conductive connectors 402 are formed on the back side of thewafer 102. The back side of the wafer 102 may be thinned before theconductive connectors 402 are formed. The thinning may be accomplishedby a chemical-mechanical polish (CMP), a grinding process, or the liketo achieve a desired thickness of the wafer 102 and/or to exposeconductive features (e.g., through vias). The conductive connectors 402are electrically connected to features of the wafer 102 (e.g., logicdevices, interposers, etc.), and may be ball grid array (BGA)connectors, solder balls, metal pillars, controlled collapse chipconnection (C4) bumps, micro bumps, electroless nickel-electrolesspalladium-immersion gold technique (ENEPIG) formed bumps, or the like.In some embodiments, the conductive connectors 402 are formed byinitially forming a layer of solder through such commonly used methodssuch as evaporation, electroplating, printing, solder transfer, ballplacement, or the like. Once a layer of solder has been formed on thestructure, a reflow may be performed in order to shape the material intothe desired bump shapes. After the conductive connectors 402 are formed,the wafer 102 may be placed on a tape 404 for subsequent processingsteps.

In FIG. 5 , the encapsulant 302 is thinned to expose top surfaces of thedie stacks 106. The thinning may be accomplished by a CMP, a grindingprocess, or the like. After the thinning, top surfaces of theencapsulant 302 and die stacks 106 are level. Following the thinning ofthe encapsulant 302, the wafer 102 and encapsulant 302 are singulated bya singulation process, thereby forming the first device packages 100, asillustrated in FIG. 6

FIG. 6 shows a resulting first device package 100 after singulation. Asa result of the singulation process, the wafer 102 is singulated intointerposers 602, with each of the first device packages 100 having aninterposer 602. The singulation may be performed while the wafer 102 ison the tape 404. The singulation is performed along scribe lines betweenadjacent device regions. For example, as illustrated in FIG. 5 , thefirst device packages 100 may be singulated along the dotted linebetween the device regions 100A and 100B. In some embodiments, thesingulation process includes a sawing process, a laser process, or acombination thereof.

As a result of the singulation process, edges of the interposers 602 andencapsulant 302 are coterminous. In other words, the outer sidewalls ofthe interposers 602 have the same width as the outer sidewalls of theencapsulant 302.

In FIG. 7 , the second device package 700 is formed by mounting thefirst device package 100 to a package substrate 702. The packagesubstrate 702 may be made of a semiconductor material such as silicon,germanium, diamond, or the like. Alternatively, compound materials suchas silicon germanium, silicon carbide, gallium arsenic, indium arsenide,indium phosphide, silicon germanium carbide, gallium arsenic phosphide,gallium indium phosphide, combinations of these, and the like, may alsobe used. Additionally, the package substrate 702 may be an SOIsubstrate. Generally, an SOI substrate includes a layer of asemiconductor material such as epitaxial silicon, germanium, silicongermanium, SOI, SiGe-on-insulator (SGOT), or combinations thereof. Thepackage substrate 702 is, in one alternative embodiment, based on aninsulating core such as a fiberglass reinforced resin core. One examplecore material is fiberglass resin such as FR4. Alternatives for the corematerial include bismaleimide-triazine (BT) resin, or alternatively,other printed circuit board (PCB) materials or films. Build up filmssuch as Ajinomoto build-up film (ABF) or other laminates may be used forpackage substrate 702.

The package substrate 702 may include active and passive devices (notshown). As one of ordinary skill in the art will recognize, a widevariety of devices such as transistors, capacitors, resistors,combinations of these, and the like may be used to generate thestructural and functional requirements of the design for the seconddevice package 700. The devices may be formed using any suitablemethods.

The package substrate 702 may also include metallization layers and vias(not shown) and bond pads 704 over the metallization layers and vias.The metallization layers may be formed over the active and passivedevices and are designed to connect the various devices to formfunctional circuitry. The metallization layers may be formed ofalternating layers of dielectric (e.g., low-k dielectric material) andconductive material (e.g., copper) with vias interconnecting the layersof conductive material and may be formed through any suitable process(such as deposition, damascene, dual damascene, or the like). In someembodiments, the package substrate 702 is substantially free of activeand passive devices.

In some embodiments, the conductive connectors 402 are reflowed toattach the first device package 100 to the bond pads 704, therebybonding the interposer 602 to the package substrate 702. The conductiveconnectors 402 electrically and/or physically couple the packagesubstrate 702, including metallization layers in the package substrate702, to the second device package 700. In some embodiments, passivedevices (e.g., surface mount devices (SMDs), not illustrated) may beattached to the second device package 700 (e.g., bonded to the bond pads704) prior to mounting on the package substrate 702. In suchembodiments, the passive devices may be bonded to a same surface of thesecond device package 700 as the conductive connectors 402.

In FIG. 8 , a first underfill 802 is formed between the first devicepackage 100 and the second device package 700, surrounding theconductive connectors 402. The first underfill 802 may be formed by acapillary flow process after the first device package 100 is attached,or may be formed by a suitable deposition method before the first devicepackage 100 is attached. In embodiments in which the first underfill 802is formed by the capillary flow process, a quantity of a first underfillmaterial may be deposited at corners of the first device package 100.The first device package 100 and the second device package 700 are thenheated in order to flow the first underfill material. The firstunderfill material flows between the first device package 100 and thesecond device package 700 by capillary action. In some embodiments,surfaces of the first device package 100 and the second device package700 may be activated by exposing the surfaces to a plasma before thefirst underfill material is deposited in order to increase thewettability of the surfaces and improve the capillary action of thefirst underfill material. A limited quantity of the first underfillmaterial may be deposited to form the first underfill 802 such that thefirst underfill 802 is formed in a defined area. For example, a limitedquantity of the first underfill material may be deposited such that atopmost extent of the first underfill is disposed below a lowermostsurface of the first device package 100. A distance D1 between aperiphery of the first underfill 802 and a periphery of the first devicepackage 100 may be less than about 2 mm, less than about 2.5 mm, or lessthan about 3 mm. As illustrated in FIG. 8 , sidewalls of the firstunderfill 802 may be sloped or tapered. As further illustrated in FIG. 8, a lateral periphery of the first underfill 802 may extend beyond alateral periphery of the first device package 100. In some embodiments,the sidewalls of the first underfill 802 may be curved in across-sectional view (not separately illustrated).

In other embodiments, as illustrated in FIG. 8A, portions of a peripheryof a first underfill 802 a may be disposed within the periphery of thefirst device package 100. For example, a distance D2 between a peripheryof a lowermost surface of the first underfill 802 a and the periphery ofthe first device package 100 may be between about 100 μm and about 200μm, such as about 150 μm. Sidewalls of the first underfill 802 a may betapered or sloped in some embodiments. As illustrated in FIG. 8A, thesidewalls of the first underfill 802 a may be curved in across-sectional view. In still further embodiments, the first underfill802 may have sidewalls which are substantially perpendicular to a majorsurface of the package substrate 702 (not separately illustrated). Thesidewalls of the first underfill 802 may be aligned with sidewalls ofthe first device package 100.

The first underfill 802 may be any acceptable material, such as apolymer, epoxy, molding underfill, or the like. According to at leastone embodiment, the first underfill 802 may be formed of an epoxymaterial including a silicon filler. More specifically, the firstunderfill 802 may be formed of an epoxy material having a weightpercentage of silicon between about 50% and about 60%, such as about60%. The first underfill 802 may have a coefficient of thermal expansion(CTE) of between about 20 ppm/° C. and about 30 ppm/° C., such as about22 ppm/° C.

In FIG. 9 , a second underfill 902 is formed around the first underfill802 to form the semiconductor device 900. The second underfill 902 mayalso be formed around at least a portion of the first device package100. Although not separately illustrated, the second underfill 902 maybe formed around at least a portion of the encapsulant 302. Asillustrated in FIG. 9 , the second underfill 902 may extend from thesurface of the package substrate 702 to a point level with an uppersurface of the interposer 602. In some embodiments, a topmost extent ofthe second underfill 902 may be above the upper surface of theinterposer 602 or below the upper surface of the interposer 602. Thesecond underfill 902 may be formed along edges of the interposer 602 inorder to seal the edges of the interposer 602 and reduce cracking of theinterposer 602. The second underfill 902 may completely surround theperiphery of the first underfill 802. The topmost extent of the secondunderfill 902 may be above a topmost surface of the first underfill 802.The second underfill 902 may be formed by depositing a quantity of asecond underfill material around the first underfill 802 and heating thefirst device package 100 and the second device package 700 to flow thesecond underfill material around the first underfill 802. A distance D3between a periphery of the second underfill 902 and a periphery of thefirst device package 100 may be less than about 2 mm, less than about2.5 mm, or less than about 3 mm. As illustrated in FIG. 9 , sidewalls ofthe second underfill 902 may be sloped or tapered.

In some embodiments, such as the embodiment illustrated in FIG. 9A, asecond underfill 902 a may have sloped or tapered sidewalls, which arecurved in a cross-sectional view. Although not separately illustrated,the second underfill 902 a may be formed around at least a portion ofthe encapsulant 302. A distance D4 between a periphery of the secondunderfill 902 a and a periphery of the first device package 100 may bebetween about 2 mm and about 3 mm, such as about 2.5 mm.

The second underfill 902 may be any acceptable material, such as apolymer, epoxy, molding underfill, or the like. The second underfill 902may be formed of a different material than the first underfill 802, orthe second underfill 902 may be formed of a material having the samecomponents as the first underfill 802 in a different ratio. For example,in an embodiment in which the first underfill 802 is formed of an epoxymaterial including a silicon filler, the second underfill 902 may beformed of an epoxy material including a silicon filler having a higherconcentration of silicon than the first underfill 802. Morespecifically, the second underfill 902 may be formed of an epoxymaterial having a weight percentage of silicon between about 70% andabout 85%, such as about 80% or about 85%. In some embodiments, thesilicon filler included in the epoxy material of the first underfill 802may have a different size than the silicon filler included in the epoxymaterial of the second underfill 902.

The second underfill 902 may have a CTE of less than about 25 ppm/° C.,less than about 20 ppm/° C. or less than about 10 ppm/° C., such asabout 8 ppm/° C., about 9 ppm/° C., about 11 ppm/° C., about 22 ppm/°C., or about 24 ppm/° C. As such, the CTE of the second underfill 902may be less than the CTE of the first underfill 802 by about 18 ppm/°C., about 17 ppm/° C., or about 11 ppm/° C. The CTE of the secondunderfill 902 may also be matched to the CTE of the package substrate702. For example, the CTE of the second underfill 902 may be between theCTE of the first underfill 802 and the CTE of the package substrate 702.A ratio of the CTE of the first underfill 802 to the second underfill902 may be between about 2 and about 4, such as about 3.7, about 2.6, orabout 2. Ratios of the CTE of the first underfill 802 to the secondunderfill 902 both greater than and less than this range may lead tocracking in the underfill due to CTE mismatches between the firstunderfill 802 and the second underfill 902, or due to CTE mismatchesbetween the second underfill 902 and the semiconductor substrate 702.

The second underfill 902 may have a modulus of elasticity of betweenabout 8 and about 15, such as about 11.0 GPa, about 9.7 GPa, or about11.5 GPa. The first underfill 802 may have a modulus of elasticitysimilar to or the same as the modulus of elasticity of the secondunderfill 902.

After the first underfill 802 and the second underfill 902 are formed,the first underfill 802 and the second underfill 902 are cured. Thefirst underfill 802 and the second underfill 902 may be cured at roomtemperature, or by applying heat or ultra-violet (UV) light. In someembodiments, the first underfill 802 may be cured before forming thesecond underfill 902, or the first underfill 802 and the secondunderfill 902 may be cured simultaneously.

The second underfill 902 may have poor flowability in comparison withthe first underfill 802. For example, the second underfill 902 may havea viscosity of between about 55 Pa·s and about 70 Pa·s, such as about 65Pa·s, while the first underfill 802 may have a viscosity of betweenabout 100 Pa·s and about 200 Pa·s, such as about 150 Pa·s. As such, thefirst underfill 802 may be flowed between the first device package 100and the second device package 700 such that the space is completelyfilled and the conductive connectors 402 are surrounded.

Further, the semiconductor device 900 may experience high stress/strainat the corners of the semiconductor device 900. The second underfill 902may have less strain energy at the corners of the semiconductor device900 than the first underfill 802. For example, the second underfill 902may have a corner strain energy of between about 1 μJ and about 3 μJ,such as about 2.18 μJ, or about 1.68 μJ. Corner strain energy valuesabove these values may increase the risk of cracking in the underfill tounacceptable values. The first underfill 802 may have a corner strainenergy of between about 4 μJ and about 6 μJ, such as about 5.3 μJ, orabout 5.08 μJ. Thus, the corner strain energy of the second underfill902 may be less than the corner strain energy of the first underfill 802by between about 1 μJ and about 5 μJ, such as about 1 μJ, about 2 μJ, orabout 4 μJ. Increased corner strain energy may lead to cracks occurringearlier in the underfill; therefore, including the second underfill 902having a lower corner strain energy than the first underfill 802 reducesthe corner strain energy of the semiconductor device 900 and reduces thelikelihood of cracking in the underfill. Accordingly, including both thefirst underfill 802 and the second underfill 902 in the semiconductordevice 900 may prevent bump cracking, underfill cracking, anddelamination of the packaged semiconductor device 900 while stillallowing an underfill to flow and substantially fill an area between thefirst device package 100 and the second device package 700. As a result,the overall structure of the semiconductor device 900 is more robust.

In still further embodiments, such as the embodiment illustrated in FIG.9B, a ring 910 and/or a lid 912 may be bonded to the package substrate702. The lid 912 may be adhered directly to the first device package 100through a thermal interface material (TIM) 918 and the lid 912 may beadhered to the ring 910 through a first adhesive layer 916. The ring 910may be adhered to the package substrate 702 through a second adhesivelayer 914. The ring 910 may support the lid 912 and space the lid 912apart from the package substrate 702 to house the first device package100. In some embodiments, the ring 910 may be omitted and the lid 912may be attached directly to the package substrate 702.

The lid 912 may be formed of a metal such as copper (Cu), nickel (Ni),nickel-coated copper, aluminum (Al), an aluminum alloy, or the like. Thering 910 may be formed of a metal, such as copper (Cu), nickel (Ni),nickel-coated copper, aluminum (Al), an aluminum alloy, or the like. Thefirst adhesive layer 916 and the second adhesive layer 914 may be formedof an adhesive material, such as silicone or the like. The TIM 918 maybe formed of silicones which are polymers including silicon, carbon,hydrogen, oxygen, and sometimes other elements; alumina (Al2O3) or zincoxide (ZnO2) mixed with silicone ([R2SiO]n); or the like. The lid 912,the ring 910, and the TIM 918 may be formed of materials having highthermal conductivity. As a result, the lid 912, the ring 910, and theTIM 918 may be used to dissipate heat generated in the first devicepackage 100 to the external environment. Moreover, the lid 912 and thering 910 may provide protection for the first device package 100.

FIGS. 10 through 17 are various cross-sectional views of intermediatesteps during a process for forming a semiconductor device 1700, inaccordance with some embodiments. FIGS. 10 through 14 illustratecross-sectional views of intermediate steps during a process for forminga first package 1400, in accordance with some embodiments. The firstpackage 1400 may also be referred to as an integrated fan-out (InFO)package. In FIGS. 15 through 17 , a second package 1500 is mounted tothe first package 1400 and underfilled to form the semiconductor device1700.

FIG. 10 illustrates a carrier substrate 1002, a release layer 1004formed on the carrier substrate 1002, a dielectric layer 1006 formed onthe release layer 1004, and a metallization pattern 1008 (sometimesreferred to as a redistribution layer or a redistribution line) formedon the dielectric layer 1006. A first package region 1000A and a secondpackage region 1000B for the formation of a first package and a secondpackage, respectively, are illustrated.

The carrier substrate 1002 may be a glass carrier substrate, a ceramiccarrier substrate, or the like. The carrier substrate 1002 may be awafer, such that multiple packages can be formed on the carriersubstrate 1002 simultaneously. The release layer 1004 may be formed of apolymer-based material, which may be removed along with the carriersubstrate 1002 from the overlying structures that will be formed insubsequent steps. In some embodiments, the release layer 1004 is anepoxy-based thermal-release material, which loses its adhesive propertywhen heated, such as a light-to-heat-conversion (LTHC) release coating.In other embodiments, the release layer 1004 may be an ultra-violet (UV)glue, which loses its adhesive property when exposed to UV lights. Therelease layer 1004 may be dispensed as a liquid and cured, may be alaminate film laminated onto the carrier substrate 1002, or may be thelike. The top surface of the release layer 1004 may be leveled and mayhave a high degree of coplanarity.

In some embodiments, the dielectric layer 1006 is formed of a polymer,such as polybenzoxazole (PBO), polyimide, benzocyclobutene (BCB), or thelike. In other embodiments, the dielectric layer 1006 is formed of anitride such as silicon nitride; an oxide such as silicon oxide,phosphosilicate glass (PSG), borosilicate glass (BSG), boron-dopedphosphosilicate glass (BPSG), or the like; or the like. The dielectriclayer 1006 may be formed by any acceptable deposition process, such asspin coating, chemical vapor deposition (CVD), laminating, the like, ora combination thereof.

The metallization pattern 1008 is formed on the dielectric layer 1006.As an example to form metallization pattern 1008, a seed layer (notseparately illustrated) is formed over the dielectric layer 1006. Insome embodiments, the seed layer is a metal layer, which may be a singlelayer or a composite layer comprising a plurality of sub-layers formedof different materials. In some embodiments, the seed layer comprises atitanium layer and a copper layer over the titanium layer. The seedlayer may be formed using, for example, PVD or the like. A photoresistis then formed and patterned on the seed layer. The photoresist may beformed by spin coating or the like and may be exposed to light forpatterning. The pattern of the photoresist corresponds to themetallization pattern 1008. The patterning forms openings through thephotoresist to expose the seed layer. A conductive material is formed inthe openings of the photoresist and on the exposed portions of the seedlayer. The conductive material may be formed by plating, such aselectroplating or electroless plating, or the like. The conductivematerial may comprise a metal, like copper, titanium, tungsten,aluminum, or the like. Then, the photoresist and portions of the seedlayer on which the conductive material is not formed are removed. Thephotoresist may be removed by an acceptable ashing or stripping process,such as using an oxygen plasma or the like. Once the photoresist isremoved, exposed portions of the seed layer are removed, such as byusing an acceptable etching process, such as by wet or dry etching. Theremaining portions of the seed layer and conductive material form themetallization pattern 1008.

In FIG. 11 , a dielectric layer 1102 is formed on the metallizationpattern 1008, through vias 1104 are formed, an integrated circuit die1108 is adhered to the dielectric layer 1102 through an adhesive 1106,and an encapsulant 1110 is formed around the various components. In someembodiments, the dielectric layer 1102 is formed of a polymer, which maybe a photo-sensitive material such as PBO, polyimide, BCB, or the like,that may be patterned using a lithography mask. In other embodiments,the dielectric layer 1102 is formed of a nitride such as siliconnitride; an oxide such as silicon oxide, PSG, BSG, BPSG; or the like.The dielectric layer 1102 may be formed by spin coating, lamination,CVD, the like, or a combination thereof. The dielectric layer 1102 isthen patterned to form openings to expose portions of the metallizationpattern 1008. The patterning may be by an acceptable process, such as byexposing the dielectric layer 1102 to light when the dielectric layer isa photo-sensitive material or by etching using, for example, ananisotropic etch.

The dielectric layers 1006 and 1102 and the metallization pattern 1008may be referred to as a back-side redistribution structure 1112. Asillustrated, the back-side redistribution structure 1112 includes thetwo dielectric layers 1006 and 1102 and one metallization pattern 1008.In other embodiments, the back-side redistribution structure 1112 caninclude any number of dielectric layers, metallization patterns, andvias. One or more additional metallization pattern and dielectric layermay be formed in the back-side redistribution structure 1112 byrepeating the processes for forming a metallization pattern 1008 anddielectric layer 1102. Vias may be formed during the formation of ametallization pattern by forming the seed layer and conductive materialof the metallization pattern in the opening of the underlying dielectriclayer. The vias may therefore interconnect and electrically couple thevarious metallization patterns.

The through vias 1104 may be formed by forming a seed layer (notseparately illustrated) over the back-side redistribution structure1112, e.g., the dielectric layer 1102 and the exposed portions of themetallization pattern 1008 as illustrated. In some embodiments, the seedlayer is a metal layer, which may be a single layer or a composite layercomprising a plurality of sub-layers formed of different materials. Insome embodiments, the seed layer comprises a titanium layer and a copperlayer over the titanium layer. The seed layer may be formed using, forexample, PVD or the like. A photoresist is formed and patterned on theseed layer. The photoresist may be formed by spin coating or the likeand may be exposed to light for patterning. The pattern of thephotoresist corresponds to through vias. The patterning forms openingsthrough the photoresist to expose the seed layer. A conductive materialis formed in the openings of the photoresist and on the exposed portionsof the seed layer. The conductive material may be formed by plating,such as electroplating or electroless plating, or the like. Theconductive material may comprise a metal, like copper, titanium,tungsten, aluminum, or the like. The photoresist and portions of theseed layer on which the conductive material is not formed are removed.The photoresist may be removed by an acceptable ashing or strippingprocess, such as using an oxygen plasma or the like. Once thephotoresist is removed, exposed portions of the seed layer are removed,such as by using an acceptable etching process, such as by wet or dryetching. The remaining portions of the seed layer and conductivematerial form through vias 1104.

Integrated circuit dies 1108 may then be adhered to the dielectric layer1102 by an adhesive 1106. As illustrated in FIG. 11 , one integratedcircuit die 1108 is adhered in each of the first package region 1000Aand the second package region 1000B; however, in other embodiments, moreor less integrated circuit dies 1108 may be adhered in each region. Forexample, in an embodiment, two or more integrated circuit dies 1108 maybe adhered in each region. The integrated circuit dies 1108 may be logicdies (e.g., central processing unit, microcontroller, etc.), memory dies(e.g., dynamic random access memory (DRAM) die, static random accessmemory (SRAM) die, etc.), power management dies (e.g., power managementintegrated circuit (PMIC) die), radio frequency (RF) dies, sensor dies,micro-electro-mechanical-system (MEMS) dies, signal processing dies(e.g., digital signal processing (DSP) die), front-end dies (e.g.,analog front-end (AFE) dies), the like, or a combination thereof. Also,in some embodiments, the integrated circuit dies 1108 may be differentsizes (e.g., different heights and/or surface areas), and in otherembodiments, the integrated circuit dies 1108 may be the same size(e.g., same heights and/or surface areas).

The adhesive 1106 is on back-sides of the integrated circuit dies 1108and adheres the integrated circuit dies 1108 to the back-sideredistribution structure 1112, such as the dielectric layer 1102 in theillustration. The adhesive 1106 may be any suitable adhesive, epoxy, dieattach film (DAF), or the like. The adhesive 1106 may be applied to aback-side of the integrated circuit dies 1108, such as to a back-side ofa respective semiconductor wafer or may be applied over the surface of acarrier substrate of the integrated circuit dies 1108. The integratedcircuit dies 1108 may be adhered to the dielectric layer 1102 by theadhesive 1106 using, for example, a pick-and-place tool.

The encapsulant 1110 may then be formed on the various components. Theencapsulant 1110 may be a molding compound, epoxy, or the like, and maybe applied by compression molding, transfer molding, or the like. Aftercuring, the encapsulant 1110 can undergo a grinding process to exposethe through vias 1104 and top surfaces of the integrated circuit dies1108. Following the grinding process, top surfaces of the through vias1104, the integrated circuit dies 1108, and the encapsulant 1110 may beco-planar. In some embodiments, the grinding may be omitted, forexample, if through vias 1104 and top surfaces of the integrated circuitdies 1108 are already exposed.

In FIG. 12 , a front-side redistribution structure 1202 is formed. Thefront-side redistribution structure 1202 includes various dielectriclayers and metallization patterns (not separately labeled), sometimesreferred to as redistribution layers or redistribution lines. Thedielectric layers may be formed of a polymer, which may be aphoto-sensitive material such as PBO, polyimide, BCB, or the like, thatmay be patterned using a lithography mask. In other embodiments, thedielectric layers are formed of a nitride such as silicon nitride; anoxide such as silicon oxide, PSG, BSG, BPSG; or the like. The dielectriclayers may each be formed by spin coating, lamination, CVD, the like, ora combination thereof. The dielectric layers are then patterned. Thepatterning forms openings in each of the dielectric layers to exposeportions of the through vias 1104 and top surfaces of the integratedcircuit dies 1108 or underlying metallization patterns. The patterningmay be by an acceptable process, such as by exposing the respectivedielectric layer to light when the dielectric layer is a photo-sensitivematerial or by etching using, for example, an anisotropic etch. If thedielectric layer is a photo-sensitive material, the dielectric layer canbe developed after the exposure.

After each of the dielectric layers is formed, a metallization patternmay be formed on the respective dielectric layer. As an example to formone of the metallization patterns, a seed layer (not separatelyillustrated) is formed over the dielectric layer and in openings throughthe dielectric layer. In some embodiments, the seed layer is a metallayer, which may be a single layer or a composite layer comprising aplurality of sub-layers formed of different materials. In someembodiments, the seed layer comprises a titanium layer and a copperlayer over the titanium layer. The seed layer may be formed using, forexample, PVD or the like. A photoresist is then formed and patterned onthe seed layer. The photoresist may be formed by spin coating or thelike and may be exposed to light for patterning. The pattern of thephotoresist corresponds to the metallization pattern. The patterningforms openings through the photoresist to expose the seed layer. Aconductive material is formed in the openings of the photoresist and onthe exposed portions of the seed layer. The conductive material may beformed by plating, such as electroplating or electroless plating, or thelike. The conductive material may comprise a metal, like copper,titanium, tungsten, aluminum, or the like. Then, the photoresist andportions of the seed layer on which the conductive material is notformed are removed. The photoresist may be removed by an acceptableashing or stripping process, such as using an oxygen plasma or the like.Once the photoresist is removed, exposed portions of the seed layer areremoved, such as by using an acceptable etching process, such as by wetor dry etching. The remaining portions of the seed layer and conductivematerial form the metallization pattern and vias. The vias are formed inopenings through the dielectric layer to, e.g., the through vias 1104,top surfaces of the integrated circuit dies 1108, and/or the underlyingmetallization patterns.

The front-side redistribution structure 1202 is shown as an example.More or fewer dielectric layers and metallization patterns may be formedin the front-side redistribution structure 1202. If fewer dielectriclayers and metallization patterns are to be formed, steps and processdiscussed above may be omitted. If more dielectric layers andmetallization patterns are to be formed, steps and processes discussedabove may be repeated. One having ordinary skill in the art will readilyunderstand which steps and processes would be omitted or repeated.

In FIG. 13 , pads 1304 are formed on an exterior side of the front-sideredistribution structure 1202, conductive connectors 1302 are formed onthe pads 1304, the carrier substrate 1002 is de-bonded, and thestructure is then flipped over and placed on a tape 1306.

The pads 1304 are used to couple to conductive connectors 1302 and maybe referred to as under bump metallurgies (UBMs) 1304. In theillustrated embodiment, the pads 1304 are formed through openingsthrough the topmost dielectric layer of FIG. 12 to the topmostmetallization pattern of FIG. 12 . As an example to form the pads 1304,a seed layer (not separately illustrated) is formed over the topmostdielectric layer. In some embodiments, the seed layer is a metal layer,which may be a single layer or a composite layer comprising a pluralityof sub-layers formed of different materials. In some embodiments, theseed layer comprises a titanium layer and a copper layer over thetitanium layer. The seed layer may be formed using, for example, PVD orthe like. A photoresist is then formed and patterned on the seed layer.The photoresist may be formed by spin coating or the like and may beexposed to light for patterning. The pattern of the photoresistcorresponds to the pads 1304. The patterning forms openings through thephotoresist to expose the seed layer. A conductive material is formed inthe openings of the photoresist and on the exposed portions of the seedlayer. The conductive material may be formed by plating, such aselectroplating or electroless plating, or the like. The conductivematerial may comprise a metal, like copper, titanium, tungsten,aluminum, or the like. Then, the photoresist and portions of the seedlayer on which the conductive material is not formed are removed. Thephotoresist may be removed by an acceptable ashing or stripping process,such as using an oxygen plasma or the like. Once the photoresist isremoved, exposed portions of the seed layer are removed, such as byusing an acceptable etching process, such as by wet or dry etching. Theremaining portions of the seed layer and conductive material form thepads 1304. In the embodiment, where the pads 1304 are formeddifferently, more photoresist and patterning steps may be utilized.

The conductive connectors 1302 are formed on the UBMs 1304. Theconductive connectors 1302 may be BGA connectors, solder balls, metalpillars, controlled collapse chip connection (C4) bumps, micro bumps,electroless nickel-electroless palladium-immersion gold technique(ENEPIG) formed bumps, or the like. The conductive connectors 1302 mayinclude a conductive material such as solder, copper, aluminum, gold,nickel, silver, palladium, tin, the like, or a combination thereof. Insome embodiments, the conductive connectors 1302 are formed by initiallyforming a layer of solder through such commonly used methods such asevaporation, electroplating, printing, solder transfer, ball placement,or the like. Once a layer of solder has been formed on the structure, areflow may be performed in order to shape the material into the desiredbump shapes. In another embodiment, the conductive connectors 1302 aremetal pillars (such as a copper pillar) formed by a sputtering,printing, electro plating, electroless plating, CVD, or the like. Themetal pillars may be solder free and have substantially verticalsidewalls. In some embodiments, a metal cap layer (not shown) is formedon the top of the conductive connectors 1302. The metal cap layer mayinclude nickel, tin, tin-lead, gold, silver, palladium, indium,nickel-palladium-gold, nickel-gold, the like, or a combination thereofand may be formed by a plating process.

A carrier substrate de-bonding is then performed to detach (de-bond) thecarrier substrate 1002 from the back-side redistribution structure 1112,e.g., dielectric layer 1006. In accordance with some embodiments, thede-bonding includes projecting a light such as a laser light or an UVlight on the release layer 1004 so that the release layer 1004decomposes under the heat of the light and the carrier substrate 1002can be removed. The structure is then flipped over and placed on thetape 1306.

As further illustrated in FIG. 13 , openings are formed through thedielectric layer 1006 to expose portions of the metallization pattern1008. The openings may be formed, for example, using laser drilling,etching, or the like.

In FIG. 14 , second packages 1400 are attached to the metallizationpattern 1008 in the first package region 1000A and the second packageregion 1000B. The second packages 1400 each include a substrate 1402 andone or more stacked dies 1410 (1410A and 1410B) coupled to the substrate1402. Although a singular stack of dies 1410 (1410A and 1410B) isillustrated, in other embodiments, a plurality of stacked dies 1410(each having one or more stacked dies) may be disposed side by sidecoupled to a same surface of the substrate 1402. The substrate 1402 maybe made of a semiconductor material such as silicon, germanium, diamond,or the like. In some embodiments, compound materials such as silicongermanium, silicon carbide, gallium arsenic, indium arsenide, indiumphosphide, silicon germanium carbide, gallium arsenic phosphide, galliumindium phosphide, combinations of these, and the like, may also be used.Additionally, the substrate 1402 may be a silicon-on-insulator (SOI)substrate. Generally, an SOI substrate includes a layer of asemiconductor material such as epitaxial silicon, germanium, silicongermanium, SOI, silicon germanium on insulator (SGOI), or combinationsthereof. The substrate 1402 is, in one alternative embodiment, based onan insulating core such as a fiberglass reinforced resin core. Oneexample core material is fiberglass resin such as FR4. Alternatives forthe core material include bismaleimide-triazine (BT) resin, oralternatively, other printed circuit board (PCB) materials or films.Build up films such as Ajinomoto build-up film (ABF) or other laminatesmay be used for substrate 1402.

The substrate 1402 may include active and passive devices (not shown).As one of ordinary skill in the art will recognize, a wide variety ofdevices such as transistors, capacitors, resistors, combinations ofthese, and the like may be used to generate the structural andfunctional requirements of the design for the second package 1400. Thedevices may be formed using any suitable methods.

The substrate 1402 may also include metallization layers (not shown) andthrough vias 1406. The metallization layers may be formed over theactive and passive devices and are designed to connect the variousdevices to form functional circuitry. The metallization layers may beformed of alternating layers of dielectric (e.g., low-k dielectricmaterial) and conductive material (e.g., copper) with viasinterconnecting the layers of conductive material and may be formedthrough any suitable process (such as deposition, damascene, dualdamascene, or the like). In some embodiments, the substrate 1402 issubstantially free of active and passive devices.

The substrate 1402 may have bond pads 1408 on a first side the substrate1402 to couple to the stacked dies 1410, and bond pads 1404 on a secondside of the substrate 1402, the second side being opposite the firstside of the substrate 1402, to couple to functional connectors 1416. Insome embodiments, the bond pads 1408 and 1404 are formed by formingrecesses (not shown) into dielectric layers on the first and secondsides of the substrate 1402. The recesses may be formed to allow thebond pads 1408 and 1404 to be embedded into the dielectric layers. Inother embodiments, the recesses are omitted as the bond pads 1408 and1404 may be formed on the dielectric layer. In some embodiments, thebond pads 1408 and 1404 include a thin seed layer (not shown) made ofcopper, titanium, nickel, gold, palladium, the like, or a combinationthereof. The conductive material of the bond pads 1408 and 1404 may bedeposited over the thin seed layer. The conductive material may beformed by an electro-chemical plating process, an electroless platingprocess, CVD, ALD, PVD, the like, or a combination thereof. In anembodiment, the conductive material of the bond pads 1408 and 1404 iscopper, tungsten, aluminum, silver, gold, the like, or a combinationthereof.

In an embodiment, the bond pads 1408 and 1404 are UBMs that includethree layers of conductive materials, such as a layer of titanium, alayer of copper, and a layer of nickel. However, one of ordinary skillin the art will recognize that there are many suitable arrangements ofmaterials and layers, such as an arrangement of chrome/chrome-copperalloy/copper/gold, an arrangement of titanium/titanium tungsten/copper,or an arrangement of copper/nickel/gold, that are suitable for theformation of the bond pads 1408 and 1404. Any suitable materials orlayers of material that may be used for the bond pads 1408 and 1404 arefully intended to be included within the scope of the currentapplication. In some embodiments, the through vias 1406 extend throughthe substrate 1402 and couple at least one bond pad 1408 to at least onebond pad 1404

In the illustrated embodiment, the stacked dies 1410 are coupled to thesubstrate 1402 by wire bonds 1414, although other connections may beused, such as conductive bumps. In an embodiment, the stacked dies 1410are stacked memory dies. For example, the stacked dies 1410 may bememory dies such as low-power (LP) double data rate (DDR) memorymodules, such as LPDDR1, LPDDR2, LPDDR3, LPDDR4, or the like memorymodules.

The stacked dies 1410 and the wire bonds 1414 may be encapsulated by amolding material 1412. The molding material 1412 may be molded on thestacked dies 1410 and the wire bonds 1414, for example, usingcompression molding. In some embodiments, the molding material 1412 is amolding compound, a polymer, an epoxy, silicon oxide filler material,the like, or a combination thereof. A curing step may be performed tocure the molding material 1412, wherein the curing may be a thermalcuring, a UV curing, the like, or a combination thereof.

In some embodiments, the stacked dies 1410 and the wire bonds 1414 areburied in the molding material 1412, and after the curing of the moldingmaterial 1412, a planarization step, such as a grinding, is performed toremove excess portions of the molding material 1412 and provide asubstantially planar surface for the second package 1400.

After the second packages 1400 are formed, the second packages 1400 aremechanically and electrically bonded to the metallization pattern 1008in the first package region 1000A and the second package region 1000B byway of functional connectors 1416, the bond pads 1404. In someembodiments, the stacked dies 1410 may be coupled to the integratedcircuit die 1108 through the wire bonds 1414, the bond pads 1408 and1404, through vias 1406, the functional connectors 1416, and the throughvias 1104.

The functional connectors 1416 may be similar to the conductiveconnectors 1302 described above and the description is not repeatedherein, although the functional connectors 1416 and the conductiveconnectors 1302 need not be the same. The functional connectors 1416 maybe disposed on an opposing side of the substrate 1402 as the stackeddies 1410.

In FIG. 15 , a singulation process is performed by sawing along scribeline regions 1418 (illustrated in FIG. 14 ) e.g., between adjacentregions 1000A and 1000B. The sawing singulates the first package region1000A from the second package region 1000B. FIG. 15 illustrates aresulting, singulated first package 1500, which may be from one of thefirst package region 1000A or the second package region 1000B. The firstpackage 1500 may also be referred to as an integrated fan-out (InFO)package 1500.

In FIG. 16 , a first underfill 1602 is formed between the first package1500 and the second package 1400, surrounding the functional connectors1416. The first underfill 1602 may be formed by a capillary flow processafter the second package 1400 is attached to the first package 1500, ormay be formed by a suitable deposition method before the second package1400 is attached to the first package 1500. In embodiments in which thefirst underfill 1602 is formed by the capillary flow process, a quantityof a first underfill material may be deposited at corners of the secondpackage 1400. The first package 1500 and the second package 1400 arethen heated in order to flow the first underfill material. The firstunderfill material flows between the first package 1500 and the secondpackage 1400 by capillary action. In some embodiments, surfaces of thesecond package 1400 and the first package 1500 may be activated byexposing the surfaces to a plasma before the first underfill material isdeposited in order to increase the wettability of the surfaces andimprove the capillary action of the first underfill material.

A limited quantity of a first underfill material may be deposited toform the first underfill 1602 such that the first underfill 1602 isformed in a defined area. Portions of a periphery of a first underfill1602 may be disposed within the periphery of the second package 1400.For example, a distance D5 between a periphery of a lowermost surface ofthe first underfill 1602 and the periphery of the second package 1400may be between about 100 μm and about 200 μm, such as about 150 μm.Sidewalls of the first underfill 1602 may be tapered or sloped in someembodiments. As illustrated in FIG. 16 , the sidewalls of the firstunderfill 1602 may be curved in a cross-sectional view. In still furtherembodiments, the first underfill 1602 may have sidewalls which aresubstantially perpendicular to a major surface of the first package 1500(not separately illustrated), or the first underfill 1602 may havesidewalls which are tapered or sloped and extend past a periphery of thesecond package 1400.

The first underfill 1602 may be any acceptable material, such as apolymer, epoxy, molding underfill, or the like. According to at leastone embodiment, the first underfill 1602 may be formed of an epoxymaterial including a silicon filler. More specifically, the firstunderfill 1602 may be formed of an epoxy material having a weightpercentage of silicon between about 60% and about 70%, such as about75%. The first underfill 1602 may have a CTE of between about 20 ppm/°C. and about 30 ppm/° C., such as about 20 ppm/° C.

In FIG. 17 , a second underfill 1702 is formed around the firstunderfill 1602 to form the semiconductor device 1700. The secondunderfill 1702 may also be formed around at least a portion of thesecond package 1400, such as around the substrate 1402 and/or themolding material 1412. As illustrated in FIG. 17 , the second underfill1702 may extend from the surface of the dielectric layer 1006 to a pointlevel with an upper surface of the substrate 1402. In some embodiments,a topmost extent of the second underfill 1702 may be above the uppersurface of the substrate 1402 or below the upper surface of thesubstrate 1402. The second underfill 1702 may be formed along edges ofthe substrate 1402 in order to seal the edges of the substrate 1402 andreduce cracking of the substrate 1402. The second underfill 1702 maycompletely surround the periphery of the first underfill 1602. Thetopmost extent of the second underfill 1702 may extend above a topmostsurface of the first underfill 1602. The second underfill 1702 may beformed by depositing a quantity of a second underfill material aroundthe first underfill 1602 and reflowing the second underfill material. Adistance D6 between a periphery of the second underfill 1702 and aperiphery of the second package 1400 may be less than about 2 mm, lessthan about 2.5 mm, or less than about 3 mm. As illustrated in FIG. 17 ,sidewalls of the second underfill 1702 may be sloped or tapered and maybe curved in a cross-sectional view.

The second underfill 1702 may be any acceptable material, such as apolymer, epoxy, molding underfill, or the like. The second underfill1702 may be formed of a different material than the first underfill1602, or the second underfill 1702 may be formed of a material havingthe same components as the first underfill 1602 in a different ratio.For example, in an embodiment in which the first underfill 1602 isformed of an epoxy material including a silicon filler, the secondunderfill 1702 may be formed of an epoxy material including a siliconfiller having a higher concentration of silicon than the first underfill1602. More specifically, the second underfill 1702 may be formed of anepoxy material having a weight percentage of silicon between about 70%and about 85%, such as about 75% or about 85%. In some embodiments, thesilicon filler included in the epoxy material of the first underfill1602 may have a different size than the silicon filler included in theepoxy material of the second underfill 1702.

The second underfill 1702 may have a CTE of less than about 25 ppm/° C.,less than about 20 ppm/° C. or less than about 10 ppm/° C., such asabout 8 ppm/° C., about 9 ppm/° C., about 11 ppm/° C., about 22 ppm/°C., or about 24 ppm/° C. As such, the CTE of the second underfill 1702may be less than the CTE of the first underfill 1602 by about 18 ppm/°C., about 17 ppm/° C., or about 11 ppm/° C. The CTE of the secondunderfill 1702 may also be matched to the CTE of the first package 1500.For example, the CTE of the second underfill 1702 may be between the CTEof the first underfill 1602 and the CTE of the first package 1500. Aratio of the CTE of the first underfill 1602 to the second underfill1702 may be between about 2 and about 4, such as about 3.7, about 2.6,or about 2. Ratios of the CTE of the first underfill 1602 to the secondunderfill 1702 both greater than and less than this range may lead tocracking in the underfill due to CTE mismatches between the firstunderfill 1602 and the second underfill 1702, or due to CTE mismatchesbetween the second underfill 1702 and the first package 1500.

After the first underfill 1602 and the second underfill 1702 are formed,the first underfill 1602 and the second underfill 1702 are cured. Thefirst underfill 1602 and the second underfill 1702 may be cured at roomtemperature, or by applying heat or ultra-violet (UV) light. In someembodiments, the first underfill 1602 may be cured before forming thesecond underfill 1702, or the first underfill 1602 and the secondunderfill 1702 may be cured simultaneously.

The second underfill 1702 may have poor flowability in comparison withthe first underfill 1602. For example, the second underfill 1702 mayhave a viscosity of between about 55 Pa·s and about 70 Pa·s, such asabout 65 Pa·s, while the first underfill 1602 may have a viscosity ofbetween about 100 Pa·s and about 200 Pa·s, such as about 150 Pa·s. Assuch, the first underfill 1602 may be flowed between the first package1500 and the second package 1400 that the space is completely filled andthe functional connectors 1416 are surrounded.

Further, the semiconductor device 1700 may experience high stress/strainat the corners of the semiconductor device 1700. The second underfill1702 may have less strain energy at the corners of the semiconductordevice 1700 than the first underfill 1602. For example, the secondunderfill 1702 may have a corner strain energy of between about 1 μJ andabout 3 μJ, such as about 2.18 μJ, or about 1.68 μJ. Corner strainenergy values above these values may increase the risk of cracking inthe underfill to unacceptable values. The first underfill 1602 may havea corner strain energy of between about 4 μJ and about 6 μJ, such asabout 5.08 μJ, or about 5.3 μJ. Thus, the corner strain energy of thesecond underfill 1702 may be less than the corner strain energy of thefirst underfill 1602 by between about 1 μJ and about 5 μJ, such as about1 μJ, about 2 μJ, or about 4 μJ. Increased corner strain energy may leadto cracks occurring earlier in the underfill; therefore, including thesecond underfill 1702 having a lower corner strain energy than the firstunderfill 1602 reduces the corner strain energy of the semiconductordevice 1700 and reduces the likelihood of cracking in the underfill.Accordingly, including both the first underfill 1602 and the secondunderfill 1702 in the semiconductor device 1700 may prevent bumpcracking, underfill cracking, and delamination of the packagedsemiconductor device 1700 while still allowing an underfill to flow andsubstantially fill an area between the first package 1500 and the secondpackage 1400. As a result, the overall structure of the semiconductordevice 1700 is more robust.

Although not separately illustrated, according to some embodiments, thesemiconductor device 1700 may include on or more lids and rings similarto the ring 912 and the lid 914 discussed above in reference to theembodiment illustrated in FIG. 9B. More specifically, a first lid and afirst ring may be provided to dissipate heat generated in the firstpackage 1500 and to protect the first package 1500 and a second lid anda second lid may be provided to dissipate heat generated in the secondpackage 1400 and to protect the second package 1400. In someembodiments, a single ring and a single lid may be provided to dissipateheat generated in both the first package 1500 and the second package1400 and to protect both the first package 1500 and the second package1400. As such, heat may be dissipated from the first package 1500 andthe second package 1400 to the external environment and the firstpackage 1500 and the second package 1400 may be protected.

According to an embodiment, a device includes a package including anintegrated circuit die, an interposer bonded to the integrated circuitdie by a plurality of die connectors, and an encapsulant surrounding theintegrated circuit die; a package substrate bonded to the interposer bya plurality of conductive connectors; a first underfill between thepackage and the package substrate, the first underfill having a firstcoefficient of thermal expansion (CTE); and a second underfillsurrounding the first underfill, the second underfill having a secondCTE less than the first CTE. In an embodiment, the first underfilltapers from the package toward the package substrate. In an embodiment,the second underfill tapers from the package substrate toward thepackage. In an embodiment, the first underfill and the second underfilltaper from the package substrate toward the package. In an embodiment,the first underfill is in contact with the interposer and spaced apartfrom the encapsulant. In an embodiment, the second underfill is incontact with the package and spaced apart from the conductiveconnectors. In an embodiment, the first underfill has a greaterflowability than the second underfill.

In accordance with another embodiment, a method includes attaching a dieto a first surface of an interposer; encapsulating the die with anencapsulant; forming a plurality of conductive connectors on a secondsurface of the interposer, the second surface being opposite the firstsurface; bonding the interposer to a package substrate through theconductive connectors; depositing a first underfill between theinterposer and the package substrate and around the conductiveconnectors; and depositing a second underfill surrounding the firstunderfill, the second underfill having a lower coefficient of thermalexpansion (CTE) than the first underfill. In an embodiment, forming thefirst underfill includes flowing a first underfill material between theinterposer and the package substrate. In an embodiment, the firstunderfill is cured before forming the second underfill. In anembodiment, the first underfill and the second underfill are curedsimultaneously. In an embodiment, the method further includes exposingsurfaces of the interposer and the package substrate to a plasma beforeforming the first underfill. In an embodiment, the second underfill hasa higher concentration of silicon by weight than the first underfill. Inan embodiment, the second underfill has a CTE lower than a CTE of thefirst underfill.

In accordance with yet another embodiment, a device includes a firstpackage including a first integrated circuit die, an encapsulant aroundthe first integrated circuit die, and a redistribution layer over theencapsulant and the first integrated circuit die; a plurality offunctional connectors; a second package bonded to the first package bythe plurality of functional connectors, the functional connectors andthe redistribution layer electrically connecting a second integratedcircuit die of the second package to the first integrated circuit die; afirst underfill between the first package and the second package, thefirst underfill surrounding the plurality of functional connectors; asecond underfill surrounding the first underfill, the second underfillhaving a different material composition than the first underfill, atopmost extent of the second underfill being disposed above a topmostsurface of the first underfill. In an embodiment, the second underfillhas a lower coefficient of thermal expansion (CTE) than the firstunderfill. In an embodiment, the second underfill extends below thesecond package directly between the first underfill and theredistribution layer. In an embodiment, the second underfill is incontact with a first side surface of the second package and a secondside surface of the second package opposite the first side surface ofthe second package. In an embodiment, a lateral periphery of the firstunderfill extends beyond a lateral periphery of the first package. In anembodiment, the second underfill extends from a top surface of theredistribution layer to a sidewall of the second package.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A device comprising: a first package comprising:a first integrated circuit die; an encapsulant around the firstintegrated circuit die; and a redistribution layer over the encapsulantand the first integrated circuit die; a plurality of functionalconnectors; a second package bonded to the first package by theplurality of functional connectors, wherein the functional connectorsand the redistribution layer electrically couple a second integratedcircuit die of the second package to the first integrated circuit die; afirst underfill between the first package and the second package, thefirst underfill surrounding the plurality of functional connectors,wherein a first width of the first underfill adjacent the first packageis less than a second width of the first underfill adjacent the secondpackage; and a second underfill surrounding the first underfill, thesecond underfill having a different material composition than the firstunderfill, wherein a topmost extent of the second underfill is disposedabove a topmost surface of the first underfill.
 2. The device of claim1, wherein the second underfill has a lower coefficient of thermalexpansion (CTE) than the first underfill.
 3. The device of claim 1,wherein the second underfill extends below the second package directlybetween the first underfill and the redistribution layer.
 4. The deviceof claim 1, wherein the second underfill is in contact with a first sidesurface of the second package and a second side surface of the secondpackage opposite the first side surface of the second package.
 5. Thedevice of claim 1, wherein a lateral periphery of the first underfillextends beyond a lateral periphery of the first integrated circuit die.6. The device of claim 1, wherein the second underfill extends from atop surface of the redistribution layer to a sidewall of the secondpackage.
 7. The device of claim 1, wherein a third width of the secondunderfill proximal the first package is greater than a fourth width ofthe second underfill proximal the second package and distal the firstpackage.
 8. A device comprising: a first package comprising: afront-side redistribution structure; a first integrated circuit die overthe front-side redistribution structure; an encapsulant surrounding thefirst integrated circuit die; and a back-side redistribution structureover the encapsulant and the first integrated circuit die; a secondpackage bonded to the first package by a conductive connector; a firstunderfill between the first package and the second package, the firstunderfill having a first coefficient of thermal expansion (CTE), whereina first width of the first underfill extending along a surface of thesecond package is greater than a second width of the first underfillextending along a surface of the first package; and a second underfillsurrounding the first underfill, the second underfill having a secondCTE less than the first CTE, wherein the second underfill is in directcontact with the back-side redistribution structure and a substrate ofthe second package.
 9. The device of claim 8, wherein the second packagecomprises: a second integrated circuit die over the substrate; and amolding material over the substrate and surrounding the secondintegrated circuit die, wherein the second underfill is in directcontact with the molding material.
 10. The device of claim 9, whereinthe second integrated circuit die is electrically coupled to theconductive connector by a wire bond extending through the moldingmaterial and a through via extending through the substrate.
 11. Thedevice of claim 8, wherein the first package further comprises a viaover the front-side redistribution structure, wherein the encapsulantsurrounds the via, wherein the first integrated circuit die iselectrically coupled to the back-side redistribution structure throughthe front-side redistribution structure and the via.
 12. The device ofclaim 8, further comprising an adhesive bonding the first integratedcircuit die to the back-side redistribution structure.
 13. The device ofclaim 8, wherein the first underfill tapers from the second packagetoward the first package and wherein the second underfill tapers fromthe first package toward the second package.
 14. A device comprising: adie attached to a back-side redistribution structure; an encapsulantencapsulating the die; a front-side redistribution structure over thedie and the encapsulant; a conductive connector over the back-sideredistribution structure; a package bonded to the back-sideredistribution structure through the conductive connector; a firstunderfill deposited between the back-side redistribution structure andthe package, wherein the first underfill surrounds the conductiveconnector, wherein a width of the first underfill along the back-sideredistribution structure is less than a width of the first underfillalong the package; and a second underfill surrounding the firstunderfill, the second underfill having a lower coefficient of thermalexpansion (CTE) than the first underfill, the second underfill having afirst sidewall contacting the first underfill, the second underfillhaving a second sidewall opposite the first sidewall, the secondsidewall extending from a sidewall of the package to a surface of theback-side redistribution structure.
 15. The device of claim 14, whereinthe first underfill comprises curved sidewalls.
 16. The device of claim14, wherein the first underfill comprises an epoxy material having aweight percentage of silicon in a range of 60% to 70%.
 17. The device ofclaim 14, wherein the first underfill has a first CTE in a range of 20ppm/° C. to 30 ppm/° C.
 18. The device of claim 17, wherein a ratio ofthe first CTE of the first underfill to a second CTE of the secondunderfill is in a range of 4:1 to 2:1.
 19. The device of claim 14,wherein the second underfill has a higher concentration of silicon byweight than the first underfill.
 20. The device of claim 14, furthercomprising a via over the back-side redistribution structure adjacentthe die, wherein the via is encapsulated by the encapsulant, and whereinthe die is electrically coupled to the front-side redistributionstructure though the back-side redistribution structure and the via.